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U57系列减压器

产品说明

GENTEC U57 series single-stage regulators are a springless, threadless, point-of-use tied diaphragm design for modern semiconductor manufacturers, equipment manufacturers and end users. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.

FEATURES

• 316L and Hastelloy® body
• Metal to metal diaphragm to body seal
• Easy front panel and rear bracket mounting
• Gauge ports are standard with 1/4” face seal male. Internal 1/4” face seal female is also available
• No springs or threads are exposed to the wetted area
• Standard fully internal electropolished
• Designed for very low particle generation
• Cleaned, assembled and packaged for high purity semiconductor applications
• High-cycle life
• 100% Helium-leak tested

MATERIALS OF CONSTRUCTION

• Wetted
• Body： 316L stainless steel, Hastelloy®
• Seat： PCTFE
• Diaphragm： Elgiloy®, Hastelloy®
• Poppet： 316 stainless steel, Hastelloy®
• Compression Member： 316 stainless steel, Hastelloy®
• Remaining Part： 316 stainless steel, Hastelloy®
  
  Non-wetted
• Nut： 316 stainless steel
• Cap： nickel plated brass
• Knob： ABS Plastic
  
  Operating Conditions
• Maximum Inlet Pressure： 300 psig (20 barg)
• Outlet Pressure： 0-30 psig (2 barg)
• Temperature： 0°F to 140°F (-18°C to 60°C)
  
  Functional Performance
• Flow Capacity： Cv=0.054
• Maximum Leak Rate:
  　　Inboard Leakage： 0.5 x 10^-9 atm cc/sec He
  　　Outboard Leakage： 1.0 x 10^-9 atm cc/sec He
  　　Across Seat Leakage： 1.0 x 10^-9 atm cc/sec He
• Proof Pressure： 150% of maximum rated pressure
• Burst Pressure： 400% of maximum rated pressure
  
  Surface Finish
• Standard Ra (EP)： 10 μin
• Optional Ra (EP)： 5 μin
  
  Internal Volume
  　　9.3 cc

型号参数：

Series	Body	Ports	Seat	Inlet Pressure	Outlet Pressure	Gauge	Inlet/Outlet Connections	Options
U57	SL: 316L	A: 2 port	K: PCTFE	G: 300psig	L: 0-30psig	P: with gauge	91: FSR(1/4"F)	E: 5 μin
	H: Hastelloy®	B: 3 port				W: without gauge	92: FSR(1/4"M)	I: Internal 1/4" FSR(F) gauge ports
		G: 4 port					41: 1/4" tube weld stub	T: Trim Hastelloy® internal
		J: 4 port

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