Through technology and design transfer, Gentec can now offer our customers,in the semiconductor industry, high quality Ultra High Purity Diaphragm Cylinder Valve at a competitive pricing.
- Manual and actuated versions are available based on a common body design.
- Suitable for most special gases including variants for oxygen and highly corrosive gases such as chlorine and hydrogen chloride.
- Built to ultra high purity standards in a dedicated clean room facility. Final assembly and testing is carried out under class 10 conditions.
- Designed for the low leakage rates demanded by high purity gas users. Each valve is tested for leakage using a mass spectrometer.
- Non tied-diaphragm construction; the diaphragms act directly on the seat to close the valve, which minimizes dead space and wetted area.
- Mechanically supported and retained valve seat to minimize deformation under load and seat lift under reverse flow conditions.
- The diaphragm isolates the operating mechanism from the process fluids, it is of one-piece non-welded construction for greater integrity and improved fatigue life.
- To prevent the shedding of particulate contamination, there are no sliding, rotating or rubbing components in the flow path.
- For optimal cleaning and purging, the inlet is shaped for enhanced gas flow and body is electrochemically polished.
- Inlet and outlet port configurations are available to suit all known industry standards. The same valve family can be used for all fluids in all market areas.
- Hand-wheels can be wire locked.
- For transportation the actuator can be locked closed to prevent shock induced leakage.
- Both manual and actuated versions fit under standard valve protection caps.
- The outlet port is sealed and protected by a cap retained by a chain.
- The valve mechanism incorporates secondary sealing for enhanced safety.
- (π) marking for TPED by Notified Body.
Specification:
- Working pressure: 230bar (3300psi)
- Fluid Media: Industrial and special gases including toxic and corrosive gases and oxygen
- Nominal Bore: 4mm
- Cv: 0.3
- Operating temperature: -20 to +65°C
- Outboard (gland) Leak rate: less than 1x10-9 mbar l/s (200bar He)
- Inlet/Outlet (seat) Leak rate: less than 1x10-8 mbar l/s (200bar He)
Materials of Construction:
- BODY - 316L VAR stainless steel, Hastelloy C22, Monel or Nickel
- SEAT - PCTFE, Kynar 740, Vespel SP21 or Zytel 103 (Nylon)
- DIAPHRAGM - Elgiloy
No lubrication is used in the flow path and the seat materials are chosen for minimal gas absorption. Please contact us for advice on material selection.
Port Options:
- European Standards: Inlet DIN 477, EN 629; Outlet DIN 477, BS 341, ISO 10692-1
- US Standards: Inlet NGT: Outlet CGA, ISO 10692-1
- Japanese Standards: Inlet and Outlet JIS
Any combination of port configurations can be supplied on request.
Optional Features:
- Pressure relief device
- Purge ports
- Outlet flow restrictor
Actuator Specification:
A normally-closed actuated version is available for all valve variants. The valve is opened by applying pressure to the pilot port and is closed by a spring. The valve can be locked closed for transportation by rotating the locking collar.
- Pilot pressure: 5 to 8bar (70 to 120psi)
- Actuating medium: Air or Nitrogen
- Pilot Port: 1/8” NPT
- Materials of Construction: Stainless Steel, Nickel Aluminium Bronze and Hard Anodised Aluminium Alloy.
