GENTEC U53 series regulators are threadless, high purity, non-tied diaphragm regulator. Our metal-to-metal diaphragm to body seal is designed to minimize leakage and to provide excellent accuracy and longevity.
Features
- 316L stainless steel body
- Metal to metal diaphragm to body seal
- Easy front panel and rear bracket mounting.
- Gauge ports are standard with 1/4” face seal male, and the internal 1/4” face seal female is also available.
- Internally threadless nozzle assembly
- Standard full internal electropolish
- Design for very low particle generation
- Cleaned, assembled and packaged for ultra high purity semiconductor applications
- High cycle life
- 100% Helium leak tested
MATERIALS OF CONSTRUCTION
- Wetted
- Body： 316L stainless steel, Hastelloy®
- Seat： PCTFE
- Diaphragm： Elgiloy®, Hastelloy®
- Poppet： 316 stainless steel, Hastelloy®
- Compression Member： 316 stainless steel, Hastelloy®
- Remaining Part： 316 stainless steel, Hastelloy®
Non-wetted
- Nut： 316 stainless steel
- Cap： nickel plated brass
- Knob： ABS Plastic
Operating Conditions
- Maximum Inlet Pressure： 300 psig (20 barg)
- Outlet Pressure： 0-30 psig (2 barg)
- Temperature： 0°F to 140°F (-18°C to 60°C)
Functional Performance
- Flow Capacity： Cv=0.054
- Maximum Leak Rate:
Inboard Leakage： 0.5 x 10-9 atm cc/sec He
Outboard Leakage： 1.0 x 10-9 atm cc/sec He
Across Seat Leakage： 1.0 x 10-9 atm cc/sec He
- Proof Pressure： 150% of maximum rated pressure
- Burst Pressure： 400% of maximum rated pressure
Surface Finish
- Standard Ra (EP)： 10 μin
Internal Volume
9.3 cc
